Grande Vitesse Systems
GVS Vacume


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GVS offers totally custom integrated and manufacturing PVD (Physical Vapor Deposition) Cathodic Arc Deposition, DCD (Dynamic Compound Deposition), DLC (Diamond-Like Coating), and CVD (Chemical Vapor Deposition), to meet your expectations: a continuous 24/7 operation. These systems' design true highly qualified engineers combine the highest reliability with an optimum quality.

• Defining the right solution...
Aluminum Titanium Nitride Coating (AlTiN) – A wear resistant PVD coating used for tools machining cast iron, high nickel and titanium alloys, hardened steels, stainless steels and more. This coating is also excellent in stamping and forming applications. Furthermore, as the temperature at the tool/work piece interface exceeds 1380° F, the aluminum uses oxygen from the air and converts the outer layer of the AlTiN to Al2O3, thereby creating an extremely hard and heat resistant layer.
• Custom Design consulting...
A comprehensive proposal is worked out including recommendations on Cathodic Arc Deposition – One of several methods for producing PVD coatings. This vacuum arc process generates the ions used for coating by forming an electrical discharge that is sustained primarily on the electrons and ions that originate from the cathodes used to produce the arc. The high ionization rate of this process makes it good general purpose coating process.

CVD (Chemical Vapor Deposition) – This high temperature coating process, as it relates to tooling applications, involves the deposition of a solid material onto a heated substrate via a chemical reaction from a gas phase. This process can be done in atmosphere or vacuum. Because this is a chemical bond, the bond strength is many times stronger than achieved through the PVD process. CVD is typically used for carbide inserts, forming tools and other high load applications. Due to the high processing temperature (1925° F), there are some material and tolerance limitations. Due to the high processing temperature, all tool steels and High Speed Steels (HSS) must be heat treated after this coating process.

• Factory Acceptance Testing...
Satisfactory completion of testing at GVS' San Francisco lab insures that not only our products are performing at their best, but most importantly, the integration of all software and hardware components is successful. At this point the system is ready for final implementation at the customer's site.

• Turnkey implementation...
On-site installation of all GVS hardware and software is provided. A lot of energy is put into software integration and its interface to assure the client the best possible balance of use.

• On-site training...
A comprehensive custom training program is scheduled for all operators and system administrators, covering configuration, operation and basic maintenance.

PVD  Vacume System Select image below to play video of current inventory 

Technical Specifications for: Leybold vacuum system Coating Chamber Cylindrical stainless steel chamber 64" diameter, 80" length and 145-feet³ volumes. Horizontally mounted with motor drive automatic side opening door over the railing.

The depositing sources could be mounted on the center of the chamber for uniform deposition, easy access to targets assembling.

The drum tooling system which sets inside the chamber with six 20" dia. or eight 16" or twelve 12"dia. and 70" length workstations.

Vacuum Pump Stand Leybold E-250 Rotary vane pump: 250 m³/h Leybold Ruvac WS1000 Roots pump: 1000 m³/h Two-oil Diffusion pump; 6000 l/s Refrigerated cold trap with compressor The PLC process control device, including control unit and measuring instruments, controls the vacuum pump set for rough vacuum, fine vacuum, and control of a stepwise venting of the vacuum chamber.
Vacuum Measuring and Control System Leybold Tm-21 and TM-22 vacuum gauging system to control pressure and vacuum process with:
Two -Pirani gauge for t pressure range 5 x10-4
–1000 mbar Two Penning gauge for the pressure range:
10-2 - 10-7 mbar Two -capacity manometer (Baratron) as signal transmitter Options:

Deposition Source and Power Supply One large tube Arc deposition source target with 80 inches length One Arc deposition DC power supply.
12 KW power Arc evaporators have direct cooling by a replaceable cathode plate or tube equipped with any target materials.
High-voltage power supply (BIAS) The BIAS high voltage power supply 19" rack mount .
One Ion etching and Bias High voltage power supply.
10 KW power Voltage range of: 0-1000Volt Up to a current of:
10 A Substrate Heating Substrate will be heated in deposition time by radiation heating sources.
4 - 6 KW Temperature Measurement System The temperature is measured by thermocouple or non-contact infrared sensor and appears on a digital display.

The system disposes of an adjustable response time of 10 ms to 10 s. One infrared temperature sensor:
60 - 700°F Process gas supply and control system The installed gas supply system enables the usage of up to a total number two gases by mass flow controls Argon and Nitrogen or any other gas.
GVS9000 4U Computer control for fully automatic operation The PLC control system has been designed in a way that no especially skilled staff is required.

Control, regulation and monitoring are carried out fully automatically and manually.
The systems are equipped with a supervisory computer.
Thus all the components within the PVD system can be monitored.
Nominal values can be entered, actual values can be monitored. Furthermore the statues of safety control devices can be checked and all parameters are recorded and can be printed out for documentation purposes.

This allows modern high quality coating processes The operating comfort is equivalent to the usual high Windows standard.
To support the trouble shooting, the system can be linked to a telephone modem, which enables a total view into all conditions of the machine.
Rotational Drive Ferro Fluid High vacuum Rotary Feed through including, drive for rotate the substrate fixture.
Rotation speed: 0 - 100 r.p.m.
Loading capacity on rotational transfer joint: 1000 lb Quick loading system

The quick loading system consists of rotary feed through with quick couple rails in the chamber Cold Trap A Cold Trap, chilled with refrigerator compressor mounted in a separate additional flange by circulation water and coolant mixture inside the trap for adsorbing water vapor to shorten pumping time.

Substrate holders for quick change This substrate holder system allows the quick change of fully loaded substrate holders, e.g. a planetary holder together with a parking table and a lift car This system is supported by a rotary feed through with a quick couple as well as by guiding rails on the bottom of the chamber Quick change planetary substrate table with gearwheel drive for 3 axis rotation with 8 shafts.
The pre-loaded planetary can be easily loaded and unloaded to the coating chamber by a lift-car.
Transportation lift car for the quick loading and unloading of a complete planetary substrate holder from the coating chamber to a parking table.

Vacuum System Avalible at Southern California

GVS current inventory of part, can be utilize in custom design of your specific Sputtering Vacuum Deposition system at significant cost saving to meet your specific application:    

     Innotec DS-28C RF Magnetron Deposition system
  • Chamber, 24” diameter and 12” high. With a dual 19” instrument rack
  • CTI Cryo-Torr 8 Cryo pump side mounted with high conductance valve
  • CTI 8300 compressor with 8001 controllers.
  • 2KW RF power supply with matching system as Bias, for each and cleaning
  • One, large 14" dim. Magnetron sources with their RF Matching system (With Al2O3 Target)
  • MKS complete vacuum gauges valve and process control systems
  • Temperature and Thickness control
  • Electro pneumatically actuated Valves
  • VCS vacuum system controller provides automatic valve sequencing, pressure readout and
  • Complete executive control of process. VSC can sense both analog and digital signals (RS-232c)

    Bosch Engineering VS 24C RF Magnetron Deposition system

  • Chamber, 24” diameter and 12” high. With a dual 19” instrument rack/
  • CTI Cryo-Torr 8 Cryo pump side mounted with high conductance valve/
  • CTI 8300 compressor with 8001 controllers.
  • 2KW RF power supply with matching system as Bias, for each and cleaning/
  • One, large 14" dim. Magnetron sources with their RF Matching system (With Al2O3 Target)
  • Complete vacuum gauges valve and process control systems
  • Temperature and Thickness control/
  • Electro pneumatically actuated Valves/
  • VCS vacuum system controller provides automatic valve sequencing, pressure readout and/
  • Complete executive control of process. VSC can sense both analog and digital signals (RS-232c)/
LEYBOLD HERAEUS Model A 550 VZK Sputtering System
  • Includes Turbo Pump, control cabinet, and RF power supply.
  • Chamber size is 590mm diameter
  • High Sputtering Rates
  • Low substrate temperature during sputtering
  • Excellent layer thickness uniformity resulting from variable cathode-to substrate spacing and symmetrical arrangement of the sputtering chamber
  • High throughput: 10 substrates 3" dia per load
  • Processes: RF-etch, RF-sputtering, RF-bias-sputtering
  • Microprocessor controlled
  • Leybold Turbo Pump
  • Baffles for pre-sputtering and sputter-etching
  • Water cooled substrate carrier and substrate mounting plate
    VECOR YBM-15 Large vacuum thermal deposition system,
  • Cylindrical Stainless Steel chamber, 64" diameter and 80" length. with  automatic side opening door
  • 4 set moveable thermal evaporation sources for coating 8 pieces 48” x 72” mirrors.
  • Two 40"diffusion pumps 6000 l/sec with Cold Trap and gate valves,
  • 170 cfm rotary piston vacuum pump,
  • De-installed, can be inspected, 1992 vintage. (1)

Industrial Enclosure PLC,
Programmable Controller inside 19” instrument rack.
The dimensions are approx 6' x 2 1/2' x 3 1/2' Inside the enclosure is Mitsubishi A1561PN/A2ASCPU
Programmable controller, 4 modules, circuit/ breaker     
Phoenix Contact transformer and other electrical components
 
2- Vacuum Pumps:

  • Leybold Trivac D40 BCS vacuum pump with EXH Filter & EIS                                                            
  • Leybold Trivac D65 BCS vacuum pump with EXH Filter & EIS /                                                 
  • Leybold Trivac D40 BCS vacuum pump with EXH Filter /  Roots Blower WSU250                                            
  • Leybold Trivac D40 BCS vacuum pump with EXH Filter & Roots Blower WSU500                        
  • Leybold Trivac D65 BCS vacuum pump with EXH Filter & Roots Blower WSU501                        
  • Leybold Trivac D65 BCS vacuum pump with EXH Filter & Roots Blower WSU1001                     
  • Leybold Rotary piston, pump   E250, 895071, 1182450010
  • Leybold Ruvac WSU-500 Roots pump
  • Leybold Ruvac WA1001/ Roots pump                                          
  • Leybold Trivac D30 Vacuum pump
  • Leybold Trivac D 16B Vacuum Pump
  • Edwards E2M40/ EH 500 Roots Blower package with PC controller                                           
  • Edwards E2M8 Vacuum pump
  • Edwards E2M5 Vacuum Pump
  • Edward pump E-275 Package
  • Alcatel Vacuum Pump, Type: Z 2030C
  • Leybold Trivac Vacuum Pump D4A. This is a 220V unit
  3-Turbo Pumps & controllers: Ebara Turbo pump Model ET1600 WS
  1. Balzers turbo pump Model TPH 1500 Plasma part # PM P01 491 C/P526A
  2. Edwards turbo pump Model EXT-255H  (With Cable)
  3. Varian Turbo controller TV 2000 ICE Model 969-9448 S003 (brand new &with cables)
  4. Leybold Turbo controller Turbotronik NT 450 Vacuum/
  5. VG Elemental Vac Turbo Pump Mains Distribution Unit
  6. Osaka Power Supply Turbo Pump Controller
 4-Vacuum Systems station: (Rotary pump, diffusion, valves & gauges):
  1. VEECO MS-12 leak Detector
  2. Varian 936-65 SP leak Detector
  3. Leybold Leak-Detector Model LD 21
  4. UTI Vacuum Diffusion Pump Model ESV-750M 50M
  5. Neslab HX-75 Refrigerated Recirculating Chiller
  6. CTI-Cryogenics 8001 Controller
  7. Edwards Diffusion Pump Model: 160 
 5-Vacuum gauges:
  1. Leybold vacuum gauge Thrmovac TM 220S2                                                                          
  2. Leybold Process and Valve controller                                                                                     
  3. Leybold   Vacuum gauge Thermovac Model TM220
  4. Leybold Pirani Gauges for vacuum system Three Small Ionization Vacuum Gauge Tubes
  5. Vacuum Valves, Fittings, Flex coupling and connecting Hardware 
  6. Three Small Ionization Vacuum Gauge Tubes
  7. IPEC / Planar Ring Guard .560 Qty 25 New In Box-
  8. Titanium Deposition Sputtering Control
  9. MKS 315 Pirani Micro-Controller digital vacuum gauge
  10. ETI TECHNOLOGY 8142TK VACUUM ION GUAGE TUBE
  11. Granville Phillips 275 RS-485 Interface
  12. MKS BARATRON TYPE 128A
  13. Leybold THERMOVAC TM 210 vacuum Meter
  14. SensaVac Series 945 Vacuum Sensor System
  15. Balzers QMG 064 Partial Pressure Gauge
  16. /Leybold Cold Cathode Vacuum Pump Gauge
  17. LEYBOLD THERMOVAC SENSOR NEW
  18. Varian three Small Ionization Vacuum Gauge Tubes
  19. Leybold Ionevac Sensor NEW
  20. Edwards PRL 10 Vacuum Gauge (Qty: 4)
  21. Edwards High Vacuum PRM10 Pirani Gauge (Qty: 3)
  22. Edwards High Vacuum Penning Gauge (Qty: 2)
  23. Edwards 1105 Vacuum Gauge and Controller.
  24. Edwards 1102 Vacuum Gauge and Controller.
  25. Leybold Pirani Gauges vacuum sensor (Qty: 3)
  26. Vacumetrics High Vacuum Ion Gauge Tube
  27. Varian High Vacuum Ion Gauge Tube
  28. Edwards Pirani PRM 10 D021-66-000
  29. MKS Baratron Pressure Transducer Type722 Cap. Manometer
 6- Vacuum Valves:
  1. Aptech Regulator Model AP15105 4PW FV4 FV4 0
  2. CPA 4” Gate Valve Model 7818
  3. Norcal Products ESVP 1502 CF Vacuum Valve
  4. NC Nor-Cal Vacuum Valve Model #: ESVP B002 IS
  5. Edwards Pipeline Valve Model: PV16PKA B RIGHT ANGLE
  6. Edwards Pipeline Valve Model: PV16PKA B In-Line
  7. Edwards Pipeline Valve Model: PV25
  8. Edwards Hi Vacuum Valve PV-10 Pneumatic
  9. Edwards Hi Vacuum Valve PV25E right angle
  10. MDC Valve W/Solenoid (K40’s)
  11. HPS-MKS Hi-Vac Valve (K25's)
  12. Thermionics Vacuum Valve W/ Humphrey TYNA
  13. Leybold bellows pneumatic vacuum valve
  14. Leybold 2 Port Valve W/ Magnet shout
  15. Manual butterfly valve 304SS 4" Thomson HD gate flange
  16. VAT Pressure Controller Model# 640 PC-G
  17. VACUUM RESEARCH CORP. 6”ALUMINUM GATE VALVE
  18. VAT HV 8" SS Gate Valve. Model# 14046-PE44
  19. MDC 8”SS High Vacuum Gate Valve Model : GV-8000V-P-01-10
   7-Meslanues Vacuum and others Items:Balzers 14” Dim. Magnetron Sputtering target Model BK-Q01-146 Applied Materials 14” dim. Titanium target Large Hi-Vacuum Bellows with Flange NW-25
  • Varian Flexible bellows  (deferent sizes and diameter
  • Leybold Flexible bellows  (deferent sizes and diameters)
  • Leybold Leak-Detector Model LD 21 sensors
  • Leybold   vacuum process controller model #VP01
  • BOC Edwards Swing Clamps (9) New NW-25
  • Kurt lesker Mass Flow meter, range 0-150 scfm output: 0-6vdc, gas: air
  • Varian VZU2701C62 DC power supply
  • Single Phase SCR Control Controller Concepts 150 KVA
  • Leybold  Combitron Vacuum Controller
  • IPEC / Planar Ring Guard .560 Qty 25 New In Box
  • Vacuum Bellows 30" Long (Qty: 2)
  • VG Elemental Vac Turbo Pump Mains Distribution Unit
  • Ferro Fluidics 2” dim. SS Rotational Feed Through Model B51701  51-121369Z
  • Vacuum Bellows 19" Long (Qty: 2)
  • Leybold, BRIS, BSC, Remote Indicator System
  • Leybold Systems Controller, 72142082 pump indicator
  • K-Tec Residual Current Relay RCD300M2
  • Balzers Type PVA 160H No BVP 11000 109 Valve controller
  • Leybold W/ Newport Temperature Controller Qty: 2
  • Land GP303A Infrared Thermometer c/w Landmark X Processo.
  • Brookfield Digital Viscometer DV-II HBTDV-IICP200 Motor


Leybold A550 VZK RF Sputtering System 

Leybold A 550 VZK RF Sputtering System with All OEM Components 

This is a COMPLETE System 

1- COMPLETE OEM SYSTEM: LEYBOLD

2- Leybold Sputtering chamber: Approximately 24" in diameter.

3- Leybold RF-Etching, RF Sputtering.

4- Leybold Matching network.

5- Leybold RF-biassystem.

6- Leybold Turbo pump model TMP450, Leybold controller Model NT450

7- Leybold Control Rack: 18Kva, 35A.

     7-1 Leybold Thermovac TM 220S2 Leybold Penningvac vacuum system. 

     7-2 Leybold Model ME03 0-10V 2 ea. Leybold Model ATP 01 Digital Displays and Auto Switches.

8- Total (4 per side) Up/Down Control Arrows Display Screen Keypads:

LEYBOLD A 550 VZK, From the Manufacturer: Characteristics 

- High sputtering rates - Low substrate temperature during sputtering 

- Excellent layer thickness uniformity resulting from variable cathode to substrate spacing and symmetrical arrangement of the sputtering chamber High throughput 

- Processes: RF-etching, RF-sputtering, RF-bias-sputtering 

- Sputtering chamber is easily accessible - Microprocessor controlled 

- Turbo pumped System Design The 590-mm diameter vacuum chamber incorporates: 

- Turbo pumped - Baffles for pre-sputtering and sputter-etching, 

- The water-cooled substrate carrier, The substrate mounting plate In addition, A550 VZK includes RF power supplies (IS 7.5 for sputtering, and TIS 1.2 for sputter-etching and bias sputtering), automatically adapted impedance matching networks, and an equipment rack holding the central controller. 

System design and Operation The relatively low chamber volume allows extremely short pump down times. 

The separation between substrates and target is optimized for the attainment of stable, homogeneous, film distributions. Finally, a Generously configured shutter prevents cross-contamination of cathode and substrates. 

Operation and Cleaning The system offers a high degree of accessibility for manual loading and unloading. 

This high degree of accessibility also simplifies routine cleaning of the coating chamber. Careful cleaning of the coating chamber is essential for maintenance of the highest coating quality standards. 

In designing the A550 VZK, close attention was paid to providing the user with the opportunity for simplified and thorough maintenance: 

- easily removable baffles that prevent sputtering deposits on chamber walls; 

A significant plus of all of LEYBOLDS systems are their expertly engineered compliments of vacuum equipment, 

The quality and dependability of your final products and your processing are closely reliant upon the maintenance of prescribed vacuum conditions. 

The A 550 VZK is supplied equipped with a turbomolecular pump and a two-stage rotary vane pump. 

A final vacuum of 5 x 10-7mbar can be reached using a chamber wall. Vacuum systems from LEYBOLD are reliable in operation and are integrated into the overall control system, and thus able to perform their duties fully automatically.

 



Grande Vitesse Systems GVS